Nanopositioning Systems, Piezo Systems:
High Stability Flexure-Guided
Piezo Positioning & Scanning Stages
Nanopositioning Systems Piezo Stage, Examples
Compact Nano-Positioning
Piezo stage for Cost-Sensitive
Applications
Scanning Microscopy Piezo Stage
with Clear Aperture
Multi-Axis Piezo Stage, Parallel
Kinematics / Parallel Metrology /
Nano-Positioning
Z-Axis Microscopy Piezo Stage for
High-Resolution Sample Positioning
and ScanningClosed-Loop Single-Axis
Nano-Positioning Piezo stage
with Direct Metrology
PIFOC Z-Stack Acquisition Objective Nanofocusing Piezo Stage
6-Axis Parallel Kinematics
Nano-Metrology Piezo Stage
High Power PIFOC Objective
Low Cost Stages with Aperture:
P-612: 100x100µm,
Nano-Positioning
Z & Tip Tilt Nano-Positioning Stages
Custom Nano-Positioning Stages
XY Microscope Stage: Fast, Low Profile and
Large Aperture with Direct
Position Measurement
PI offers the largest selection of research- and industrial-reliability Piezo Actuators, Translators (linear actuators), Piezo Systems (Piezo Stages) and Fast Steering Mirrors (Piezo Optics) worldwide. We have more than 30 years experience.
The PI piezoelectrically driven EDM (Electric Discharge Machining) cut flexure stages offer displacement ranges of 5 to 2000µm (rotation to several mrad) and limit out plane motion to sub-nm/sub-arcsecond deviation/tilt. Most of the our piezo flexure stages can be fitted with the latest generation capacitive sensors which provide resolution and repeatability better than 1 nanometer. Features of the PI piezo flexure stages include:
- Single and Multi-Axis Systems up to 6 Degrees of Freedom
- Single Module Parallel-Kinematic Multi-Axis Systems with Large Aperture
- Ultra-Fast Response
- Advanced Control Techniques for Fastest Possible Settling
- Optional Integrated Position Feedback for Closed-Loop Operation and Non-Linearity Compensation
- Step or Continuous Operation: Step Response in Low Millisecond Range
- Optional Integrated Capacitive Displacement Sensors with <1 nm Accuracy
- OEM and Custom Designs
Examples of Flexure-Guided Nano-Positioning Piezo Stages
- P-713 to P-517 Nano-Positioning Stage Series , XY, XYZ, and XY_Rot-Z, Tip/Tilt
- PI Hera , X, XY and Z Nano-Positioning Stages to 1800x1800µm
- P-587 6-Axis-Nano-Positioning Stage
- P-602 Z-Piezo Flexure Nano-Positioning Stage
P-527 Nano-Positioning StagePiezo Nano-Positioning Selection Guide